The ES660 series ESD and LU Test system is a state-of-the-art, multi-pin automated testing equipment designed to meet the rigorous demands of modern semiconductor testing. This versatile device is engineered to seamlessly support the Human Body Model (HBM), Machine Model (MM), and Latch-Up testing, offering a comprehensive solution for assessing the reliability and robustness of integrated circuits (ICs) and electronic components.
With the capability to support up to 1024 pins, the ES660-P1 is ideal for testing complex ICs and electronic components with a multitude of connections. Its high pin count capacity ensures that one can evaluate large-scale devices with precision and efficiency, reducing testing time and enhancing productivity.
For higher pin count, model ES660-P2 (up to 2048 pins) is on the development roadmap.
The ES660 series ESD and LU Test system is a state-of-the-art, multi-pin automated testing equipment designed to meet the rigorous demands of modern semiconductor testing. This versatile device is engineered to seamlessly support the Human Body Model (HBM), Machine Model (MM), and Latch-Up testing, offering a comprehensive solution for assessing the reliability and robustness of integrated circuits (ICs) and electronic components.
With the capability to support up to 1024 pins, the ES660-P1 is ideal for testing complex ICs and electronic components with a multitude of connections. Its high pin count capacity ensures that one can evaluate large-scale devices with precision and efficiency, reducing testing time and enhancing productivity.
For higher pin count, model ES660-P2 (up to 2048 pins) is on the development roadmap.
| Parameters | ES660-P1 | Unit | Comments |
| Touch Screen | 5 | inch | |
| Dimensions | 480 X 497.5 X 265 | mm | |
| Weight | 28 | kg | Full installation |
| ESD and LU Waveform | Optional Passive voltage and current probes | ||
| Supported Oscilloscope | Majority models from Keysight, Tektronix, LeCroy, Rigol, | Customizable | |
| Supported SMU | Majority models from Keysight, Tektronix, LeCroy, Rigol, | Customizable | |
| Supported PSU | Majority models from Keysight, Tektronix, LeCroy, Rigol. | Customizable |
| Parameters | ES660-P1-HBM8 | ES660-P1-HBM10 | Unit | Comments |
| Output voltage | ±10 ~ 8000 | ±10 ~ 10000 | V | |
| Discharge RC Value | C: 100 pF ± 10%, R: 1.5kΩ ± 1% | |||
| Short Load Peak Current Ips | 0.67 ± 10 % per kV | A | ||
| Short Load Rise Time trs | 2 < trs < 10 | ns | ||
| Short Load Decay Time tds | 130 < tds < 170 | ns | ||
| Short Load Ringing trs | < 15% of Ips | |||
| 500 Ω Load Peak Current Ipr | Ipr/Ips ≥ 63% | |||
| 500 Ω Load Rise Time trr | 5 < trr < 25 | ns | ||
| Parameters | ES660-P1-MM2 | ES660-P1-MM4 | Unit | Comments |
| Output Voltage | ±10 ~ 2000 | ±10 ~ 4000 | V | |
| Discharge RC Value | C: 200 pF, R: 0 Ω | |||
| Short Load Peak Current Ip1 | 1.75±10% per 100V | A | ||
| Short Load Ip2 | 67% ~ 90% of Ip1 | A | ||
| Short Load Pulse Period tpm | 66 < tpm < 90 | ns | ||
| 500 Ω Load Peak Current Ipr | 0.85 – 1.2 | A | @400V condition per standard | |
| 500 Ω Load I100 | 0.23 – 0.4 | A | @400V condition per standard | |
| Parameters | ES660-P1-LU | Comments |
| Preconditioning Vectors | ≥ 20 MHz, 256K Depth | External Setup |
| V/I 4-wire Kelvin Measurements | Y | |
| DUT V/I Bus Supplies | 3+1, 5+1, 7+1 | |
| LU Waveform Capture | Y |
Hardware-supported for Latch-Up Transient Pulse Source:
TLP, vf-TLP, EOS, MM
software on the roadmap.
| Line | Part # or Option # | Description |
| Base Unit Options | ||
| 1.1 | ES660-P1-BU | Relay Based HBM/MM/LU ATE System Base unit |
| 1.2 | ES660-P1-HBM8 | Human Body Model capability up to 8 kV |
| 1.3 | ES660-P1-HBM10 | Human Body Model capability up to 10 kV |
| 1.4 | ES660-P1-MM2 | Machine Model capability up to 2 kV |
| 1.5 | ES660-P1-MM4 | Machine Model capability up to 4 kV |
| 1.6 | ES660-P1-LU | Latch-up capability (Software) |
| 1.7 | ES660-P1-TLU | Transient Latch-up capability (Software) |
| Relay Card with Bias Options | ||
| 2.1 | ES660-P1-R64B4 | Expansion Relay Card for additional 64 Pin, 4 Bias |
| 2.2 | ES660-P1-R64B6 | Expansion Relay Card for additional 64 Pin, 6 Bias |
| 2.3 | ES660-P1-R64B8 | Expansion Relay Card for additional 64 Pin, 8 Bias |
| DC & Leakage & LU Pulse Source Options | ||
| 3.1 | ES660-PSMU2 | Leakage\DC\LU Source: Dual Channels Pulsed SMU (210V/1.5A) |
| 3.2 | ES660-SMU1 | Leakage\DC Source: Single Channel SMU (200V/1A) |
| 3.3 | ES660-PSU1 | DC Source: Flex Channels PSU (30V/3A X 2 Ch, or 60V/3A X 1 Ch) |
| 3.4 | ES660-PSU2 | DC Source: 3-Channels PSU (60V/3A X 2 Ch, 5V/3A X 1 Ch) |
| 3.4 | ES660-PSU3 | DC Source: High Current PSU (20V/20A X 1 Ch) |
| Test Socket Options | ||
| 4.1 | ES660-P1-DS512 | DUT Socket PCB 512 Pin |
| 4.2 | ES660-P1-DS1024 | DUT Socket PCB 1024 Pin |
| 4.3 | ES660-P1-DSC1 | DUT Socket PCB Customized Pin Count |
| Oscilloscope Options | ||
| 5.1 | MISC-OSC1 | Digital Oscilloscope (1 GHz, 5 GS/s, 4 Ch) |
| 5.2 | CT-T03-1p0 | Broadband Current Probe, 1V/A, 2kHz – 2GHz |
