Description
1. Description
Micro positioners, or manipulators, are widely used to accurately position probes onto a pad of a device under test (DUT). To achieve this, the micro positioners are usually placed on a probe station. Probe arms and probes can be attached on it for DC or RF tests. By moving the micro positioner in X, Y, and Z direction, the operator can place the probe needle to the exact desired position. The magnetic or vacuum base on the bottom can keep the micro positioners stable when the probe arm is manually moved.
2. Features
- High precision probe placement
- Stable, backlash free
- Linear motion
- Wide range probing
3. Applications
- I-V curve tests
- CV tests
- RF tests
- ESD pulse injection
- Device failure analysis
4. Specifications
ES62X-XYZM-TLMES62X-XYZM-TRM | (New Model Coming Soon) | |
Feature resolution | 0.7 um | 0.35 um |
Travel range (X / Y / Z) | 12.5 / 12.5 / 12.5 mm | |
Screw resolution (X / Y / Z) | 250 um/rev. | 125 um/rev. |
Mounting | Magnetic Switch | |
Footprint (W x D) | 70 mm x 60 mm | 75 mm x 60 mm |
5. Ordering Information
Part Number |
Description |
Lead Time |
ES62X-XYZM-TxM |
0.7 um resolution micro positioner | 3 weeks |