The ES62X-CMPS compact manual probe station is a rugged wafer probing solution designed for high reliability, compact size, and low investment cost. It enables manual wafer level measurements up to 300 mm wafers. The probing station can also be used for TLP, HMM, HBM, LV-Surge, RF, S-parameter, and DC-measurements. Micro positioners with vacuum as well as magnetic base can be attached. The chuck has a vacuum interface for the wafer and is electrically isolated. Multiple 4 mm connectors can be used to connect a voltage potential to the wafer backside.
Features:
The ES62X-CMPS compact manual probe station is a rugged wafer probing solution designed for high reliability, compact size, and low investment cost. It enables manual wafer level measurements up to 300 mm wafers. The probing station can also be used for TLP, HMM, HBM, LV-Surge, RF, S-parameter, and DC-measurements. Micro positioners with vacuum as well as magnetic base can be attached. The chuck has a vacuum interface for the wafer and is electrically isolated. Multiple 4 mm connectors can be used to connect a voltage potential to the wafer backside.
The trinocular stereo microscope has 3.5X to 90X magnification and is equipped with a USB camera interface and a bright and ultra-long-life LED ring light.
ES62X-CMPS-TSM Trinocular Stereo Microscope
| Parameters | Value | Unit | Comments |
| Magnification range | 3.5x – 90x | ||
| Zoom objective power | 0.7x – 4.5x | ||
| Eyepieces (DIN, 30mm) | WH10x20mm | dB | WH10x20mm high-eyepoint |
| Trinocular port | C-Mount or 23mm | dB | |
| Field of view | 2-1/2 | inch | |
| Optical working distance | Up to 8 | inch | |
| Microscope stand | Double-arm boom stand | ||
| Head movement | X-, Y-, and Z-axes | ||
| Illumination type | Episcopic (reflected) | ||
| Light source | LED ring light with rheostat | mm | |
| Power | 110 – 240 | V | |
| Dimensions | 540 x 480 x 460 | mm | |
| Weight | 25 | kg |
ES62X-CMPS-WPS Wafer Probe Station
| Parameters | Value | Unit | Comments |
| Wafer Chuck diameter | 170 | mm | up to 300 mm wafers can be attached |
| Wafer Chuck Material | Stainless Steel | Mirror finish on top | |
| Wafer Chuck Bias | 4 mm connector | ||
| Dimensions | 500 X 300 X 100 | mm | |
| Weight | About 14 | kg |
ES62X-CMPS-MVP Miniature Vacuum Pump
| Parameters | Value | Unit | Comments |
| Attainable Vacuum | -333 | mbar | |
| Free Air Displacement | 7 | l/min | |
| Inlet O.D. | 6 | mm | |
| Outlet O.D. | 6 | mm | |
| Rated Voltage | 120 | VAC | |
| Power Consumption | 14 | W | |
| Life Expectancy | 3000 | h | |
| Dimensions | 90 X 90 X 100 | mm | |
| Weight | 1 | kg |
ES62X-CMPS-PCB Magnetic Flexible PCB Holder for Probe Station
| Parameters | Value | Unit | Comments |
| Max PCB size | 180 X 130 X 2 | mm | |
| Dimensions | 215 X 180 X 100 | mm | |
| Weight | About 14 | kg |
| Line | Part # or Option # | Description |
| 1 | ES62X-CMPS | Compact manual probe station (Including all 1.x sub items) |
| 1.1 | ES62X-CMPS-TSM | Trinocular stereo microscope including USB camera and LED light |
| 1.2 | ES62X-CMPS-WPS | Flexible manual wafer probe station |
| 1.3 | ES62X-CMPS-MVP | Miniature vacuum pump and accessories |
| 1.4 | ES62X-CMPS-PCB | Magnetic Flexible PCB holder |
Customized probing design is available upon request
