ES62X-XYZM-TxM Micro Positioner

Micro positioners, or manipulators, are widely used to accurately position probes onto a pad of a device under test (DUT). To achieve this, the micro positioners are usually placed on a probe station. Probe arms and probes can be attached on it for DC or RF tests. By moving the micro positioner in X, Y, and Z direction, the operator can place the probe needle to the exact desired position. The magnetic or vacuum base on the bottom can keep the micro positioners stable when the probe arm is manually moved.

 Features

  • High precision probe placement
  • Stable, backlash free
  • Linear motion
  • Wide range probing

Description

ES62X-XYZM-TxM Micro Positioner DATASHEET (PDF)

1.  Description

Micro positioners, or manipulators, are widely used to accurately position probes onto a pad of a device under test (DUT). To achieve this, the micro positioners are usually placed on a probe station. Probe arms and probes can be attached on it for DC or RF tests. By moving the micro positioner in X, Y, and Z direction, the operator can place the probe needle to the exact desired position. The magnetic or vacuum base on the bottom can keep the micro positioners stable when the probe arm is manually moved.

2.    Features

  • High precision probe placement
  • Stable, backlash free
  • Linear motion
  • Wide range probing

3.     Applications

  • I-V curve tests
  • CV tests
  • RF tests
  • ESD pulse injection
  • Device failure analysis

4.    Specifications

 

ES62X-XYZM-TLMES62X-XYZM-TRM

(New Model Coming Soon)

Feature resolution

0.7 um 0.35 um

Travel range (X / Y / Z)

12.5 / 12.5 / 12.5 mm

Screw resolution (X / Y / Z)

250 um/rev. 125 um/rev.

Mounting

Magnetic Switch

Footprint (W x D)

70 mm x 60 mm 75 mm x 60 mm

 

5.    Ordering Information

Part Number

Description

Lead Time

ES62X-XYZM-TxM

0.7 um resolution micro positioner 3 weeks