ES62X-CMPS Compact Manual Probe Station

The ES62X-CMPS compact manual probe station is a rugged wafer probing solution designed for high reliability, compact size, and low investment cost. It enables manual wafer level measurements up to 300 mm wafers. The probing station can also be used for TLP, HMM, HBM, LV-Surge, RF, S-parameter, and DC-measurements. Micro positioners with vacuum as well as magnetic base can be attached. The chuck has a vacuum interface for the wafer and is electrically isolated. Multiple 4 mm connectors can be used to connect a voltage potential to the wafer backside.

 

Features:

  • Portable manual wafer probe station
  • Ectrically isolated chuck with vacuum interface and wafer backside potential connector
  • Trinocular stereo microscope with 3.5 – 90 x magnification
  • Includes 5 mp video camera and software
  • Ultra long-life ring-style led ring light
  • High reliability
  • Low cost

Description

ES62X-CMPS Compact Manual Probe Station Datasheet

The ES62X-CMPS compact manual probe station is a rugged wafer probing solution designed for high reliability, compact size, and low investment cost. It enables manual wafer level measurements up to 300 mm wafers. The probing station can also be used for TLP, HMM, HBM, LV-Surge, RF, S-parameter, and DC-measurements. Micro positioners with vacuum as well as magnetic base can be attached. The chuck has a vacuum interface for the wafer and is electrically isolated. Multiple 4 mm connectors can be used to connect a voltage potential to the wafer backside.

The trinocular stereo microscope has 3.5X to 90X magnification and is equipped with a USB camera interface and a bright and ultra-long-life LED ring light.

 

Features:

  • Portable manual wafer probe station
  • Electrically isolated chuck with vacuum interface and wafer backside potential connector
  • Trinocular stereo microscope with 3.5 – 90 x magnification
  • Includes 5 MP video camera and software
  • Ultra long-life ring-style LED ring light
  • High reliability
  • Low cost

 

Applications:

  • General probe station for TLP, HMM, HBM, LV-Surge, RF, S-parameter and DC-measurements
  • Adapts to different wafer sizes up to 300 mm
  • Support magnetic PCB holder up to 180 X 130 mm

 

Specifications:

ES62X-CMPS-TSM Trinocular Stereo Microscope

Parameters Value Unit Comments
Magnification range 3.5x – 90x
Zoom objective power 0.7x – 4.5x
Eyepieces (DIN, 30mm) WH10x20mm dB WH10x20mm high-eyepoint
Trinocular port C-Mount or 23mm dB
Field of view 2-1/2 inch
Optical working distance Up to 8 inch
Microscope stand Double-arm boom stand
Head movement X-, Y-, and Z-axes
Illumination type Episcopic (reflected)
Light source LED ring light with rheostat mm
Power 110 – 240 V
Dimensions 540 x 480 x 460 mm
Weight 25 kg

 

ES62X-CMPS-WPS Wafer Probe Station

Parameters Value Unit Comments
Wafer Chuck diameter 170 mm up to 300 mm wafers can be attached
Wafer Chuck Material Stainless Steel Mirror finish on top
Wafer Chuck Bias 4 mm connector
Dimensions 500 X 300 X 100 mm
Weight About 14 kg

 

ES62X-CMPS-MVP Miniature Vacuum Pump

Parameters Value Unit Comments
Attainable Vacuum -333 mbar
Free Air Displacement 7 l/min
Inlet O.D. 6 mm
Outlet O.D. 6 mm
Rated Voltage 120 VAC
Power Consumption 14 W
Life Expectancy 3000 h
Dimensions 90 X 90 X 100 mm
Weight 1 kg

 

ES62X-CMPS-PCB Magnetic Flexible PCB Holder for Probe Station

Parameters Value Unit Comments
Max PCB size 180 X 130 X 2 mm
Dimensions 215 X 180 X 100 mm
Weight About 14 kg

 

Ordering Information

Line Part # or Option # Description
1 ES62X-CMPS Compact manual probe station (Including all 1.x sub items)
1.1 ES62X-CMPS-TSM Trinocular stereo microscope including USB camera and LED light
1.2 ES62X-CMPS-WPS Flexible manual wafer probe station
1.3 ES62X-CMPS-MVP Miniature vacuum pump and accessories
1.4 ES62X-CMPS-PCB Magnetic Flexible PCB holder

Customized probing design is available upon request