The model ES612 ESD Tester is a 2 Pin tester designed for the evaluation of devices at both wafer level and package level. The tester is designed to carry HBM, HMM and MM ESD standards. Determination of ESD failure thresholds is made easy using one of the external DC characterization measurement capabilities.
The pulse source design and pulse source delivery method ensure waveform performance directly at the device under test. Current waveforms can be automatically captured and analyzed for each ESD event. In addition, voltage waveforms can be captured and used to determine the turn-on level of protection circuit. They can also be used as a means of failure determination, as the DC characterizations show changes after ESD events.
Model ES612 is obsolete since 2022, the replacement model is ES612A
The model ES612 ESD Tester is a 2 Pin tester designed for the evaluation of devices at both wafer level and package level. The tester is designed to carry HBM, HMM and MM ESD standards. Determination of ESD failure thresholds is made easy using one of the external DC characterization measurement capabilities.
The pulse source design and pulse source delivery method ensure waveform performance directly at the device under test. Current waveforms can be automatically captured and analyzed for each ESD event. In addition, voltage waveforms can be captured and used to determine the turn-on level of protection circuit. They can also be used as a means of failure determination, as the DC characterizations show changes after ESD events.
ES612 Controller Options
| Parameters | ES612-2K | ES612-4K | ES612-6K | ES612-8K | ES612-12K | ES612-20K | Unit |
| Output voltage | ± 10 ~ 2000 | ± 10 ~ 4000 | ± 10 ~ 6000 | ± 10 ~ 8000 | ± 10 ~ 12000 | ± 10 ~ 20000 | V |
| Output voltage step | 1V up to 500V,
10V up to 2 kV |
1V up to 500V,
10V up to 4 kV |
1V up to 500V,
10V up to 6 kV |
1V up to 500V,
10V up to 8 kV |
1V up to 500V,
10V up to 12 kV |
1V up to 500V,
10V up to 20 kV |
V,
kV |
| Output voltage precision | Better than ± 1 % ± 5 V | % | |||||
| Dimensions | 347 X 300 X 145 | mm | |||||
| Weight | 5 | 6 | 6 | 6 | 6 | 7 | kg |
| V and I Measurement | Passive voltage and current probes | ||||||
| Supported Oscilloscopes | Majority models from Keysight, Tektronix, LeCroy. | ||||||
| Supported SMU | Keysight 2900 Series, Keithley 24xx/26xx series SMU. | ||||||
HBM External Human Body Model Module
(Per ANSI/ESDA/JEDEC JS-001-2017)
| Parameters | HBM-2 | HBM-4 | HBM-6 | HBM -8 | HBM -12 | HBM -20 | Unit |
| Output voltage | ± 10 ~ 2000 | ± 10 ~ 4000 | ± 10 ~ 6000 | ± 10 ~ 8000 | ± 10 ~ 12000 | ± 10 ~ 20000 | V |
| Discharge RC Value | C: 100 pF ± 10%, R: 1.5kΩ ± 1% | ||||||
| Short Load Peak Current Ips | 0.67A ± 10 % per kV | ns | |||||
| Short Load Rise Time Trs | 2 < Trs < 10 | ns | |||||
| Short Load Decay Time Tds | 130 < Tds < 170 | ns | |||||
| Short Load Ringing Irs | < 15% of Ips | ||||||
| 500 Ω Load Peak Current Ipr | Ipr/Ips ≥ 63% | ||||||
| 500 Ω Load Rise Time Trr | 5 < Trr < 25 | ns | |||||
HMM External Human Metal Model Module
(Per ANSI/ESD SP5.6-2019)
| Parameters | HMM-8 | HMM-24 | HMM-36 | Unit | Comments |
| HMM first peak current | 90 | 90 | 135 | A | 3.75 A per 1 kV ≤ ± 10 %
IEC 61000-4-2 (R=330Ω, C=150pF) |
| HMM current @ 30 ns | 48 | 48 | 72 | A | ≤ ± 10 % (better than ±30% IEC ) |
| HMM current @ 60 ns | 24 | 24 | 36 | A | ≤ ± 10 % (better than ±30% IEC ) |
MM External Machine Model Module
(Per ANSI/ESD STM5.2-2019)
| Parameters | MM-2 | MM-4 | Unit | Comments |
| Output Voltage | ±10 ~ 2000 | ±10 ~ 4000 | V | |
| Discharge RC Value | C: 200 pF, R: 0 Ω | |||
| Short Load Peak Current Ip1 | 1.75±10% per 100V | A | Tolerance may be different if socket is used | |
| Short Load Ip2 | 67% ~ 90% of Ip1 | A | ||
| Short Load Pulse Period tpm | 66 < tpm < 90 | ns | ||
| 500 Ω Load Peak Current Ipr | 0.85 – 1.2 | A | @400V condition per standard | |
| 500 Ω Load I100 | 0.23 – 0.4 | A | @400V condition per standard | |
| 500 Ω Load I200 | 30 -50% of measured I100 | A | ||
| Line | Part # or Option # | Description |
| ESD Tester | ||
| 1.1 | ES612-2K | ES612 ESD Tester, Max 2kV, RS232 SCPI Supported |
| ES612-4K | ES612 ESD Tester, Max 4kV, RS232 SCPI Supported | |
| ES612-6K | ES612 ESD Tester, Max 6kV, RS232 SCPI Supported | |
| ES612-8K | ES612 ESD Tester, Max 8kV, RS232 SCPI Supported | |
| ES612-12K | ES612 ESD Tester, Max 12kV, RS232 SCPI Supported | |
| ES612-20K | ES612 ESD Tester, Max 20kV, RS232 SCPI Supported | |
| 1.2 | ES612-HBM-2 | Human Body Model 2 Pin Module, 2kV |
| ES612-HBM-4 | Human Body Model 2 Pin Module, 4kV | |
| ES612-HBM-6 | Human Body Model 2 Pin Module, 6kV | |
| ES612-HBM-8 | Human Body Model 2 Pin Module, 8kV | |
| ES612-HBM-12 | Human Body Model 2 Pin Module, 12kV | |
| ES612-HBM-20 | Human Body Model 2 Pin Module, 20kV | |
| 1.3 | ES612-HMM-8 | Human Metal Model 2 Pin Module, 8kV equivalent HMM |
| ES612-HMM-24 | Human Metal Model 2 Pin Module, 24kV equivalent HMM | |
| ES612-HMM-36 | Human Metal Model 2 Pin Module, 36kV equivalent HMM | |
| 1.4 | ES612-MM-2 | Machine Model 2 Pin Tester Module, 2kV |
| ES612-MM-4 | Machine Model 2 Pin Tester Module, 4kV | |
| Accessories | ||
| 2.1 | CT-002-T | Current Probe 1kHz to 2 GHz (Better than Tektronix CT1 & CT2) |
| 2.2 | ES62X-CMPS | Compact Manual Probe Station |
| 2.3 | XYZM | XYZ Micropositioner, XYZ travel 500 mils with 0.01mm per step |
| 2.4 | XYZM-HBM | HBM Probe Arm Assembly |
| 2.5 | XYZM-HMM | HMM Probe Arm Assembly (47.5R) |
| 2.6 | HBM-TC0.3 | 0.3 mm Pitch Test Clip for Packaged IC Probe |
| 2.7 | HBM-TC2.5 | 2.54 mm Pitch Test Clip for PCB Probing (default conf include 1 set) |
| 2.8 | XYZM-PP048 | 0.48 mm Pogopin for package level test (pack of 20) |
| 2.9 | XYZM-TN1 | Tungsten Needles – 5 mils sharp tip, for wafer level test (pack of 10) |
| Third Party | ||
| 3.1 | KSMU2400 | SMU, 200V, 1A, 20W, Single Channel (For device DC automation failure check)) |
| 3.2 | OSC-1G | 1 GHz BW, 5Gs/S, 4Ch Oscilloscope |
