Charged Device Model (CDM) electrostatic discharge is a common cause of microelectronic circuit failure. Sensitive devices can be seriously damaged or destroyed by a CDM discharge at relatively low voltage. This often occurs when the static charged device contacts a metal surface at a different potential. Such an electrostatic discharge often has an extremely fast rise time.
The Model ES640 is a robotic CDM (Charged Device Model) tester designed to meet all popular CDM ESD test methods, allowing both field induced air discharge methods (FICDM) and relay based contact discharge methods (LI-CCDM, CC-TLP, RP-CCDM). The system includes a computer, environment-controlled chamber, precision XYZ motion system, different types of CDM tester modules, and an automated test and data analysis software.
Charged Device Model (CDM) electrostatic discharge is a common cause of microelectronic circuit failure. Sensitive devices can be seriously damaged or destroyed by a CDM discharge at relatively low voltage. This often occurs when the static charged device contacts a metal surface at a different potential. Such an electrostatic discharge often has an extremely fast rise time.
The Model ES640 is a robotic CDM (Charged Device Model) tester designed to meet all popular CDM ESD test methods, allowing both field induced air discharge methods (FICDM) and relay based contact discharge methods (LI-CCDM, CC-TLP, RP-CCDM). The system includes a computer, environment-controlled chamber, precision XYZ motion system, different types of CDM tester modules, and an automated test and data analysis software.
| Parameters | ES640-150 | ES640-300 | Units | Comments |
| Max XY Motion Area | ≥ 150 X 150 | ≥ 300 X 300 | mm | Probe motion area, customizable |
| Max DUT Area | 160 X 160 | 375 X 425 | mm | MAX Field plate area for DUT |
| Field Plate Area | 210 X 210 | 395 X 470 | mm | Field plate area |
| Z Travel | ≥ 50 | ≥ 150 | mm | |
| Min X, Y, Z Step Size | 100 | nm | ||
| Reposition Repeatability | ≤ ±6 | μm | ||
| Test Voltage Range | ±1 to 2000 or 4000 | V | Default 2000V, customizable | |
| Test Voltage Step | 1 | V | ||
| Test Voltage Accuracy | ± 1% ± 0.1V | % V | ||
| XY Vision Resolution | 1920 X 1080 | Pixel | ||
| Vertical Vision Resolution | 2592 X 1944 | Pixel | ||
| Operating Temperature | 10 to 40 | (°C) | ||
| Operating Humidity (RH) | 0 to 80 | % | ||
| Power | 120-240 VAC, 50/60 Hz | VAC | ||
| N2 or CDA Pressure | 10 – 120 | PSI | ||
| N2 or CDA Peak Usage | 0.2 | cfm | (or 0.34 m3h) | |
| 300 N2 Tank Avg Usage | ~ 19 | hour | Continuous @ 40RH environment | |
| Desiccant Avg Usage | ~ 24 | hour | Continuous @ 40RH environment | |
| Line | Part # or Option # | Description |
| ES640 Charged Device Model (CDM) Test System | ||
| 1.1 | ES640-150 | Universal CDM platform, 150 X 150 mm Test Area, 2 kV |
| 1.2 | ES640-300 | Universal CDM platform, 300 X 300 mm Test Area, 2 kV |
| 1.3 | ES640-HC | Humidity Conditioning Unit for Air Discharge Methods (Uses reusable desiccants, lower cost of usage than N2 or CDA) |
| 1.4 | ES640-CV4 | Charge Voltage Upgrade from 2kV to 4 kV |
| 1.5 | ES640-CPC | Field Plate Customization to hold 200X300 DUT |
| 1.6 | ES640-VP1 | Vacuum pump for DUT holding (Optional, Software controlled) |
| 1.7 | ES640-VP2 | High pressure tip cleaning unit (Optional, Software controlled) |
| ANSI/ESDA/JEDEC JS-002-2018 Standard Related (Followed standards include AEC_Q100-011D, AEC_Q101-005A) | ||
| 2.1 | ES640-JS002 | JS002 Discharge Unit |
| 2.2 | ES640-JS002-C | JS002/C101 Calibration Disc (Small and Big) |
| 2.3 | ES640-JS002-P1 | JS002 Replaceable Pogo Pin #1 (0.35mm diameter) |
| Legacy AEC Standard Related (Not recommend for new designs) | ||
| 3.1 | ES640-AEC-F | Legacy AEC Q100-011 Rev-C1_FI-CDM Discharge Unit |
| 3.2 | ES640-AEC-D | Legacy AEC Q100-011 Rev-C1_D-CDM Discharge Unit |
| 3.3 | ES640-AEC-C | Legacy AEC Calibration Module (4pF, 30pF) |
| Contact First CDM Solutions (New methods for discharge stability improvements, not standardized yet) | ||
| 4.1 | ES640-RPCDM | ESDEMC Patented Contact First CDM Solution
(Very repeatable contact first method, meets JS002 requirement, not require vf-TLP) |
| 4.2 | ES640-LICCDM | SP5.3.3-2018 LI-CCDM Discharge Solution
(Including Discharge unit, software support, require vf-TLP) |
| 4.3 | ES640-CCTLP | DSP5.3.4 CC-TLP (Not released yet)
(Including Discharge unit, software support, require vf-TLP) |
| 4.4 | ES640-vfTLP | Vf-TLP module for CC-TLP or LI-CCDM Method
(This vf-TLP module is a compact vf-TLP for the ES640 system. The default configuration is 1 rise-time + 1 pulse-width with limited expansion capability. If more pulse shape options are needed, model ES622 TLP/vf-TLP is the best option) |
| Third Party Instruments for CDM System | ||
| 5.1 | MISC-OSC6G | Digital Oscilloscope (6 GHz, 20 Gs) |
| 5.2 | MISC-OSC1G | Digital Oscilloscope (1 GHz, 5 Gs) *Not enough for calibration |
