ES640 Charged Device Model (CDM) Test System

Charged Device Model (CDM) electrostatic discharge is a common cause of microelectronic circuit failure. Sensitive devices can be seriously damaged or destroyed by a CDM discharge at relatively low voltage. This often occurs when the static charged device contacts a metal surface at a different potential. Such an electrostatic discharge often has an extremely fast rise time.

The Model ES640 is a robotic CDM (Charged Device Model) tester designed to meet all popular CDM ESD test methods, allowing both field induced air discharge methods (FICDM) and relay based contact discharge methods (LI-CCDM, CC-TLP, RP-CCDM). The system includes a computer, environment-controlled chamber, precision XYZ motion system, different types of CDM tester modules, and an automated test and data analysis software.

Features

  • High resolution cameras (up to 3) allow for easy pin alignment operation
  • High resolution motion control system (down to 1 µm step)
  • Allows multiple devices being tested in a batch
  • Patent-pending CCDM method allows better repeatability
  • Airtight environment chamber increases drying unit efficiency
  • Support regenerative drying unit (no need of nitrogen)

Description

1.    Introduction

Charged Device Model (CDM) electrostatic discharge is a common cause of microelectronic circuit failure. Sensitive devices can be seriously damaged or destroyed by a CDM discharge at relatively low voltage. This often occurs when the static charged device contacts a metal surface at a different potential. Such an electrostatic discharge often has an extremely fast rise time.

The Model ES640 is a robotic CDM (Charged Device Model) tester designed to meet all popular CDM ESD test methods, allowing both field induced air discharge methods (FICDM) and relay based contact discharge methods (LI-CCDM, CC-TLP, RP-CCDM). The system includes a computer, environment-controlled chamber, precision XYZ motion system, different types of CDM tester modules, and an automated test and data analysis software.

Here is a comparison between ESDEMC ES640 CDM Solution to others, including Thermo Scientific Orion3 CDM tester, GTS Scorpion Robotic CDM tester, Hanwa HED-C5000R, TET Model 1100, Fraunhofer EMFT MCDM3.

2.    Features

  • High resolution cameras (up to 3) allow for easy pin alignment operation
  • High resolution motion control system (down to 1 µm step)
  • Allows multiple devices being tested in a batch
  • Patent-pending CCDM method allows better repeatability
  • Airtight environment chamber increases drying unit efficiency
  • Support regenerative drying unit (no need of nitrogen)

3.    Applications

  • General charged device model (CDM) system for package and wafer level tests
  • Support many popular latest CDM methods:
    • ANSI/ESDA/JEDEC JS-002-2018 (FICDM)
    • AEC Q100-011 Rev-D (2019 Ver. follows JS-002)
    • AEC Q101-005 Rev-A (2019 Ver. follows JS-002)
    • ANSI/ESD SP5.3.3-2018 (LI-CCDM, vf-TLP required)
    • CC-TLP (ESDA SP pending, vf-TLP required)
    • Patent pending RP-CCDM method
    • Legacy and customized solutions available upon request
  • Customizable dimension for robotic CBM (Charged Board Model) and flat panel ESD test

4.    Specifications

 

Parameters ES640-150 ES640-300 Units Comments
Max XY Motion Area ≥ 150 X 150 ≥ 300 X 300 mm Probe motion area, customizable
Max DUT Area 160 X 160 375 X 425 mm MAX Field plate area for DUT
Field Plate Area 210 X 210 395 X 470 mm Field plate area
Z Travel ≥ 50 ≥ 150 mm
Min X, Y, Z Step Size 100 nm
Reposition Repeatability ≤ ±6 μm
Test Voltage Range ±1 to 2000 or 4000 V Default 2000V, customizable
Test Voltage Step 1 V
Test Voltage Accuracy ± 1% ± 0.1V %  V
XY Vision Resolution 1920 X 1080 Pixel
Vertical Vision Resolution 2592 X 1944 Pixel
Operating Temperature 10 to 40 (°C)
Operating Humidity (RH) 0 to 80 %
Power 120-240 VAC, 50/60 Hz VAC
N2 or CDA Pressure 10 – 120 PSI
N2 or CDA Peak Usage 0.2 cfm (or 0.34 m3h)
300 N2 Tank Avg Usage ~ 19 hour Continuous @ 40RH environment
Desiccant Avg Usage ~ 24 hour Continuous @ 40RH environment

 

5.    Ordering Information

Line Part # or Option # Description
ES640 Charged Device Model (CDM) Test System
1.1 ES640-150 Universal CDM platform, 150 X 150 mm Test Area, 2 kV
1.2 ES640-300 Universal CDM platform, 300 X 300 mm Test Area, 2 kV
1.3 ES640-HC Humidity Conditioning Unit for Air Discharge Methods
(Uses reusable desiccants, lower cost of usage than N2 or CDA)
1.4 ES640-CV4 Charge Voltage Upgrade from 2kV to 4 kV
1.5 ES640-CPC Field Plate Customization to hold 200X300 DUT
1.6 ES640-VP1 Vacuum pump for DUT holding (Optional, Software controlled)
1.7 ES640-VP2 High pressure tip cleaning unit (Optional, Software controlled)
ANSI/ESDA/JEDEC JS-002-2018 Standard Related (Followed standards include AEC_Q100-011D, AEC_Q101-005A)
2.1 ES640-JS002 JS002 Discharge Unit
2.2 ES640-JS002-C JS002/C101 Calibration Disc (Small and Big)
2.3 ES640-JS002-P1 JS002 Replaceable Pogo Pin #1 (0.35mm diameter)
Legacy AEC Standard Related (Not recommend for new designs)
3.1 ES640-AEC-F Legacy AEC Q100-011 Rev-C1_FI-CDM Discharge Unit
3.2 ES640-AEC-D Legacy AEC Q100-011 Rev-C1_D-CDM Discharge Unit
3.3 ES640-AEC-C Legacy AEC Calibration Module (4pF, 30pF)
Contact First CDM Solutions (New methods for discharge stability improvements, not standardized yet)
4.1 ES640-RPCDM ESDEMC Patented Contact First CDM Solution

(Very repeatable contact first method, meets JS002 requirement, not require vf-TLP)

4.2 ES640-LICCDM SP5.3.3-2018 LI-CCDM Discharge Solution

(Including Discharge unit, software support, require vf-TLP)

4.3 ES640-CCTLP DSP5.3.4 CC-TLP (Not released yet)

(Including Discharge unit, software support, require vf-TLP)

4.4 ES640-vfTLP Vf-TLP module for CC-TLP or LI-CCDM Method

(This vf-TLP module is a compact vf-TLP for the ES640 system. The default configuration is 1 rise-time + 1 pulse-width with limited expansion capability. If more pulse shape options are needed, model ES622 TLP/vf-TLP is the best option)

Third Party Instruments for CDM System
5.1 MISC-OSC6G Digital Oscilloscope (6 GHz, 20 Gs)
5.2 MISC-OSC1G Digital Oscilloscope (1 GHz, 5 Gs) *Not enough for calibration

 

Documents

ES640 Charged Device Model (CDM) Test System DATASHEET (PDF)

Software

ES640 Charged Device Model (CDM) Test System Softwares