Description
1. Introduction
Charged Device Model (CDM) electrostatic discharge is a common cause of microelectronic circuit failure. Sensitive devices can be seriously damaged or destroyed by a CDM discharge at relatively low voltage. This often occurs when the static charged device contacts a metal surface at a different potential. Such an electrostatic discharge often has an extremely fast rise time.
The Model ES640 is a robotic CDM (Charged Device Model) tester designed to meet all popular CDM ESD test methods, allowing both field induced air discharge methods (FICDM) and relay based contact discharge methods (LI-CCDM, CC-TLP, RP-CCDM). The system includes a computer, environment-controlled chamber, precision XYZ motion system, different types of CDM tester modules, and an automated test and data analysis software.
2. Features
- High resolution cameras (up to 3) allow for easy pin alignment operation
- High resolution motion control system (down to 1 µm step)
- Allows multiple devices being tested in a batch
- Patent-pending CCDM method allows better repeatability
- Airtight environment chamber increases drying unit efficiency
- Support regenerative drying unit (no need of nitrogen)
3. Applications
- General charged device model (CDM) system for package and wafer level tests
- Support many popular latest CDM methods:
- ANSI/ESDA/JEDEC JS-002-2018 (FICDM)
- AEC Q100-011 Rev-D (2019 Ver. follows JS-002)
- AEC Q101-005 Rev-A (2019 Ver. follows JS-002)
- ANSI/ESD SP5.3.3-2018 (LI-CCDM, vf-TLP required)
- CC-TLP (ESDA SP pending, vf-TLP required)
- Patent pending RP-CCDM method
- Legacy and customized solutions available upon request
- Customizable dimension for robotic CBM (Charged Board Model) and flat panel ESD test
4. Specifications
Parameters | ES640-150 | ES640-300 | Units | Comments |
Max XY Motion Area | ≥ 150 X 150 | ≥ 300 X 300 | mm | Probe motion area, customizable |
Max DUT Area | 160 X 160 | 375 X 425 | mm | MAX Field plate area for DUT |
Field Plate Area | 210 X 210 | 395 X 470 | mm | Field plate area |
Z Travel | ≥ 50 | ≥ 150 | mm | |
Min X, Y, Z Step Size | 100 | nm | ||
Reposition Repeatability | ≤ ±6 | μm | ||
Test Voltage Range | ±1 to 2000 or 4000 | V | Default 2000V, customizable | |
Test Voltage Step | 1 | V | ||
Test Voltage Accuracy | ± 1% ± 0.1V | % V | ||
XY Vision Resolution | 1920 X 1080 | Pixel | ||
Vertical Vision Resolution | 2592 X 1944 | Pixel | ||
Operating Temperature | 10 to 40 | (°C) | ||
Operating Humidity (RH) | 0 to 80 | % | ||
Power | 120-240 VAC, 50/60 Hz | VAC | ||
N2 or CDA Pressure | 10 – 120 | PSI | ||
N2 or CDA Peak Usage | 0.2 | cfm | (or 0.34 m3h) | |
300 N2 Tank Avg Usage | ~ 19 | hour | Continuous @ 40RH environment | |
Desiccant Avg Usage | ~ 24 | hour | Continuous @ 40RH environment |
5. Ordering Information
Line | Part # or Option # | Description |
ES640 Charged Device Model (CDM) Test System | ||
1.1 | ES640-150 | Universal CDM platform, 150 X 150 mm Test Area, 2 kV |
1.2 | ES640-300 | Universal CDM platform, 300 X 300 mm Test Area, 2 kV |
1.3 | ES640-HC | Humidity Conditioning Unit for Air Discharge Methods (Uses reusable desiccants, lower cost of usage than N2 or CDA) |
1.4 | ES640-CV4 | Charge Voltage Upgrade from 2kV to 4 kV |
1.5 | ES640-CPC | Field Plate Customization to hold 200X300 DUT |
1.6 | ES640-VP1 | Vacuum pump for DUT holding (Optional, Software controlled) |
1.7 | ES640-VP2 | High pressure tip cleaning unit (Optional, Software controlled) |
ANSI/ESDA/JEDEC JS-002-2018 Standard Related (Followed standards include AEC_Q100-011D, AEC_Q101-005A) | ||
2.1 | ES640-JS002 | JS002 Discharge Unit |
2.2 | ES640-JS002-C | JS002/C101 Calibration Disc (Small and Big) |
2.3 | ES640-JS002-P1 | JS002 Replaceable Pogo Pin #1 (0.35mm diameter) |
Legacy AEC Standard Related (Not recommend for new designs) | ||
3.1 | ES640-AEC-F | Legacy AEC Q100-011 Rev-C1_FI-CDM Discharge Unit |
3.2 | ES640-AEC-D | Legacy AEC Q100-011 Rev-C1_D-CDM Discharge Unit |
3.3 | ES640-AEC-C | Legacy AEC Calibration Module (4pF, 30pF) |
Contact First CDM Solutions (New methods for discharge stability improvements, not standardized yet) | ||
4.1 | ES640-RPCDM | ESDEMC Patented Contact First CDM Solution
(Very repeatable contact first method, meets JS002 requirement, not require vf-TLP) |
4.2 | ES640-LICCDM | SP5.3.3-2018 LI-CCDM Discharge Solution
(Including Discharge unit, software support, require vf-TLP) |
4.3 | ES640-CCTLP | DSP5.3.4 CC-TLP (Not released yet)
(Including Discharge unit, software support, require vf-TLP) |
4.4 | ES640-vfTLP | Vf-TLP module for CC-TLP or LI-CCDM Method
(This vf-TLP module is a compact vf-TLP for the ES640 system. The default configuration is 1 rise-time + 1 pulse-width with limited expansion capability. If more pulse shape options are needed, model ES622 TLP/vf-TLP is the best option) |
Third Party Instruments for CDM System | ||
5.1 | MISC-OSC6G | Digital Oscilloscope (6 GHz, 20 Gs) |
5.2 | MISC-OSC1G | Digital Oscilloscope (1 GHz, 5 Gs) *Not enough for calibration |